Wafer Sorting Systems
IL 2600
- Split, Merge and Sort 2″-200mm Wafers
- Up to 6 Open Cassette Loading/Unloading Stations
- Vacuum or Edge Grip Handling Available
- Sorting Throughput: 300 Wafer/Hour
- Transfer Throughput: 600 Wafer/Hour
IL C3200
- Split, Merge and Sort 300mm Wafers
- Up to 3 Automatic FOUP Loadports
- ISO 3 Minienvironment (ISO 14644-1)
- Suitable for PGV, AGV and OHT Loading
- Can be used as a wafer transfer module in comparison with measurement or inspection tool (EFEM)
- Sorting Throughput: 250 Wafer/Hour
- Transfer Throughput: 380 Wafer/Hour
IL C3600
- Split, Merge and Sort 300mm Wafers
- Up to 5 Automatic FOUP Loadports
- ISO 3 Minienvironment (ISO 14644-1)
- Suitable for PGV, AGV and OHT Loading
- Can be used as a wafer transfer module in comparison with measurement or inspection tool (EFEM)
- Sorting Throughput: 240 Wafer/Hour
- Transfer Throughput: 360 Wafer/Hour
IL C3800
- Split, Merge and Sort 300mm Wafers
- Up to 7 Automatic FOUP Loadports
- ISO 3 Minienvironment (ISO 14644-1)
- Suitable for PGV, AGV and OHT Loading
- Can be used as a wafer transfer module in comparison with measurement or inspection tool (EFEM)
- Sorting Throughput: 240 Wafer/Hour
- Transfer Throughput: 360 Wafer/Hour
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